Large capacity open loading PECVD system

Designed to produce high quality uniform dielectric films

Stress control in PECVD is provided by selectable or mixed high/low frequency plasma power, enabling deposited films to be tuned for tensile, compressive or low stress.

Batch sizes:

Wafer size No. of wafers Wafer size No. of wafers
2" (50mm) >43 8" (200mm) 2
4" (100mm) 12 12" (300mm) 1
6" (150mm) 5    
System features:
  • Up to 300mm wafers
  • High performance processes
  • Small footprint
  • Excellent substrate temperature control
  • Precise process control
  • Clean endpoint detection by optical emission spectroscopy can be fitted to the PlasmaPro 800 for reliability and servicability
  • Range of electrode sizes and wafer capacity
  • Large electrodes delivering market leading cost of ownership
  • Substrate temperature control is provided up to 400°C
  • Options of a 4-, 8- or 12-line gas pod provides flexibility in processes and process gases, and may be remotely sited in the service area, away from the main process tool
  • Industry proven for HBLED processes

 

Download the brochure...

PlasmaPro 800 Brochure

Large capacity open-loading process solutions for plasma etch and deposition

PDF 1.03MB

Gallery

Tool Support

Comdel Generator

Comdel Generator

Comdel Generator upgrade for increased performance

Dry Pump N2 Standby Mode

Dry Pump N2 Standby Mode

Get the dry pump N2 standby mode upgrade to save energy & nitrogen

Gas Pod

Gas Pod

Our upgraded gas pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility.

LogViewer Software

LogViewer Software

New datalogging software that allows realtime graphing and post run analysis

Optical End Point Detectors

Optical End Point Detectors

Optical end point detection Upgrades for etch & deposition tools

Ionfab300-1-co

Soft Pump

Soft pump/Soft Vent feature upgrade for increased performance

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump Upgrade

X20 Control System

X20 Control System

X20 control system designed to replace the Blue RS232 PLC.