E3 software provides completely quantitative data acquisition of induced/absorbed current, with full control of all amplifier settings and integrated scan control and simultaneous SE imaging. Software tools include Current Voltage (IV) characterisation, live mix of signals for fault localisation, measurement of beam current and calibration. Analysis packages provides programmable signal processing, direct measurements, and calibrated data export.
Software tools include:
Current/Voltage (IV) characterisation
Live mix of signals for fault localisation
Measurement of beam current and calibration
The analysis packages provide programmable signal processing, direct measurements, and calibrated data export
E3 Brochure and Application Note
The E3 quantitative nanoprobing microanalysis system enables the electrical characterisation (EBIC, EBAC and Electrical probing) of devices and materials in the SEM & FIB. This 8 page brochure gives an overview of the E3 product.
EBIC Analysis Application Note
Electron Beam Induced Current is a well established analysis method of electrical activity in the SEM. It provides a unique correlation of electrical and structural properties with very high spatial resolution.This application note shows how the Oxford Instruments integrated EBIC microanalysis system is configured and applied to analyse defects in a Si solar cell.