3D EDSAZtec3D combines simultaneous EDS and EBSD data acquisition & analysis with the automated milling capabilities of a FIB-SEM.

Overview

Automated materials characterization in 3D

  • Superior data quality, combining Tru-I and Tru-Q in 3D
  • Optimized data acquisition through superfast EBSD and large area SDD
  • AZtec AuoLock Drift Correction
  • Simple setup for simultaneous EDS & EBSD data acquisition and FIB milling
  • Observe the EDS & EBSD map data slice by slice as it is collected

AZtec3D - 3D EDS analysis

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