With X-Max Extreme users can characterise the composition and distribution of surface contaminants and layers a few atoms thick.
Integrate characterisation of surfaces with SEM investigation
Analyse the surface structures only visible with in-lens detectors at very low kV and short working distance
Save money and time vs Auger/XPS
Example: X-ray Maps collected at 1kV to characterise high-end electronic component stain detected using In Lens SE imaging.