Sub 10 nm element characterisation in the SEM
X-ray map resolution close to SEM resolution
Example 1: Sn imaging standard
X-ray mapping at 2kV of tin nano-sphere high resolution imaging standard, 6,500cps, 15 min acquisition time.
Example 2: Ni-base Superalloy
Fine Ni3(NbTi) gamma” precipitates in Alloy 718, collected at 1.5 kV, 2,000cps for 18 minutes - Sample and data courtesy of University of Manchester.