AZtec Microanalysis System for TEM

AZtec provides the ultimate materials characterisation system for EDS applications in the TEM and STEM. It is ideal for users working at the frontiers of analytical performance.

  • Based on X-MaxN  range of Silicon Drift Detectors
    • X-MaxN 100TLE: our flagship 100 mm2 TEM detector is ideal for field emission TEMs and aberration corrected systems
      • Windowless for better light element detection
      • Dual detector option offers the worlds most sensitive EDS solution with a solid angle greater than 2 steradians
    • X-MaxN TSR, provides a large solid angle for conventional 200kV TEMs
    • X-MaxN 80 T is an 80 mm2 detector ideal for standard TEM applications
    • X-MaxN 65T is an 65 mm2 detector for routine EDS spectrum acquisition in the TEM
  • AZtecTEM software provides the power to acquire and process EDS data in real-time including drift correction, spectral mapping and linescanning

Brochures and Application Notes

AZtecTEM solutions brochure

A 16 page brochure showing why AZtecTEM is the most powerful solution for EDS on the TEM. It comprises software and hardware sections (inc X-Max 100TLE and X-Max TSR).

PDF 4.63MB
Semiconductor analysis in the TEM

Development and testing of semiconductor devices requires extensive knowledge of local structure and elemental composition. With feature sizes of <5 nm, it is often necessary to perform imaging and EDS analysis in a S/TEM.

Once in the TEM, there are still many difficulties to be overcome to acquire accurate elemental maps. Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. This brief shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis.

PDF 3.27MB
Simultaneous EDS & EELS in the TEM

In Transmission Electron Microscopy (TEM) there are two ‘go to’ techniques for elemental analysis: Energy Dispersive X-ray Spectroscopy, (EDS), and Electron Energy Loss Spectroscopy, (EELS). Simultaneous acquisition of both signals is a powerful tool for materials analysis...

PDF 4.26MB
EDS for TEM Explained

This 12 page document gives an introduction to EDS applications in the Transmission Electron Microscope (TEM). It covers the theory of the SDD operation and X-ray analysis.

This document is available in bulk free of charge to universities and other institutions giving a course on the subject.

PDF 4.04MB

Products In This Group

EDS for TEM Software - AZtecTEM

EDS for TEM Software - AZtecTEM

AZtecTEM EDS microanalysis software is packed with innovative tools and technologies that transform the the characterisation of materials in the TEM

SDD Detector for TEM - X-MaxN 100TLE

SDD Detector for TEM - X-MaxN 100TLE

Our flagship SDD detector for TEM, the X-MaxN 100TLE provides the perfect solution for field emission and abberation corrected TEMs working at the frontiers of nanoscience.

Silicon Drift Detector for TEM - X-MaxN TSR

Silicon Drift Detector for TEM - X-MaxN TSR

X-MaxN TSR is Silicon Drift Detector for TEM applications and provides a large solid angle for conventional 200kV TEMs.

SDD Detector for TEM: X-MaxN 80 T

SDD Detector for TEM: X-MaxN 80 T

Specially designed to maximise EDS performance in the TEM, with a large-area 80 mm2 sensor, the X-MaxN 80 T optimises solid angle and analytical performance.