Qualitative and Quantitative EDS analysis for TEM

Qualitative Analysis in the TEM: Real-time analysis and reporting

Point & ID

Often the first step in analysing the sample. With AZtec this is fast, accurate and reproducible - you simply select the areas to analyse then, in the short time it takes to collect a spectrum:

  • All elements are automatically identified
  • Composition is displayed in the unique miniQuant window
  • You can quickly annotate points of interest for others to note ...and send your mini report to others with a single click


Accurate and reliable, AutoID allows users to identify peaks in real-time as spectra are being collected during the scan.

  • No need to know which elements are present beforehand
  • Exclude elements from the analysis, if required
  • Uses Tru-Q technology to correctly identify elements at all count rates - even where peaks overlap


Automatically keep the field of view locked to the same area. This is of special relevance to STEM when collecting high resolution images and maps.

  • Enables analysis at resolutions that are normally difficult to achieve because of drift
  • Provides live updates of corrective actions being taken
  • A unique blend of predictive and reactive correction routines cope with different types of drift

Quantitative Analysis in the TEM: Providing the accuracy for real-time quant analysis


Tru-Q is a unique Oxford Instruments’ technology that provides high accuracy AutoID and quantitative analysis. It uses a combination of technologies:

  • Complete detector and hardware characterisation for a true standardless analysis
  • Robust FLS spectrum processing that works in all situations. For example, there is no need for any background fitting adjustment
  • Modified Cliff-Lorimer – TEM quant that allows sample thickness and density to be taken into consideration
  • Theoretical or user-defined k-factors can be applied
  • K, L or M lines can be chosen for quantitative analysis
  • PPC - Automatic correction for pulse pile-up at high count making accurate quant at 200,000 cps a reality
  • Removal of unwanted non-sample peaks (e.g. Cu from grid)

Now everyone can achieve reliable results


Congratulations to Dr Kate A. Ross for winning the 2018 Lee Osheroff Richardson (LOR) Science Prize for North and S… https://t.co/5GEVpMSy6K
5:11 PM - 20 Feb 18
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