Qualitative and Quantitative EDS analysis for TEM

Qualitative Analysis in the TEM: Real-time analysis and reporting

Point & ID

Often the first step in analysing the sample. With AZtec this is fast, accurate and reproducible - you simply select the areas to analyse then, in the short time it takes to collect a spectrum:

  • All elements are automatically identified
  • Composition is displayed in the unique miniQuant window
  • You can quickly annotate points of interest for others to note ...and send your mini report to others with a single click


Accurate and reliable, AutoID allows users to identify peaks in real-time as spectra are being collected during the scan.

  • No need to know which elements are present beforehand
  • Exclude elements from the analysis, if required
  • Uses Tru-Q technology to correctly identify elements at all count rates - even where peaks overlap


Automatically keep the field of view locked to the same area. This is of special relevance to STEM when collecting high resolution images and maps.

  • Enables analysis at resolutions that are normally difficult to achieve because of drift
  • Provides live updates of corrective actions being taken
  • A unique blend of predictive and reactive correction routines cope with different types of drift

Quantitative Analysis in the TEM: Providing the accuracy for real-time quant analysis


Tru-Q is a unique Oxford Instruments’ technology that provides high accuracy AutoID and quantitative analysis. It uses a combination of technologies:

  • Complete detector and hardware characterisation for a true standardless analysis
  • Robust FLS spectrum processing that works in all situations. For example, there is no need for any background fitting adjustment
  • Modified Cliff-Lorimer – TEM quant that allows sample thickness and density to be taken into consideration
  • Theoretical or user-defined k-factors can be applied
  • K, L or M lines can be chosen for quantitative analysis
  • PPC - Automatic correction for pulse pile-up at high count making accurate quant at 200,000 cps a reality
  • Removal of unwanted non-sample peaks (e.g. Cu from grid)

Now everyone can achieve reliable results