Our flagship SDD detector for TEM, the X-MaxN 100TLE provides the perfect solution for field emission and aberration corrected TEMs working at the frontiers of nanoscience.

The X-MaxN 100TLE exploits a new sensor shape, a windowless configuration, and an innovative mechanical design to deliver truly ‘next generation’ SDD performance.This combination provides unrivalled enhancement in sensitivity for all elements.

For example, it will:

  • Detect much lower concentration of elements when acquiring under the same conditions as a conventional detector
    • Analyse impurities and dopants at the nanoscale
  • Collect more data before the beam degrades sensitive samples
    • Analyse nanoparticles and nanotubes to new levels of detail

Outstanding performance

  • Maximises count rate at the nano- and pico-scale
  • Unique sensor design brings 100 mm2 active area closer to the sample for ultra high solid angle
  • Windowless configuration ensures the best sensitivity for all elements and unrivalled detection of low energy X-rays
  • Performs accurate quant at count rates >100Kcps with accurate pulse pile up correction

Outstanding practicality

  • Easily installed and retrofitable to existing columns
  • Auto-retraction with flap for protection against electron flux damage
  • Pressure sensor automatically protects the detector in case of vacuum loss
  • LN2-free operation
  • No need to tilt sample to optimise solid angle

The clear choice for all TEM nanoanalyses, and the only choice for semiconductors, biological and other beam sensitive materials.


TEM microanalysis of a nanotube

Oxford Instruments thanks the Faculty and Staff of the EMS, University of Illinois, Chicago for their help in preparing these data.

Windowless Detector

Windowless detectorsWindowless detectors provide more counts at all energies with unrivalled low energy performance.


  • Collection efficiency is significantly improved compared to detectors of a similar solid angle that need to use a thin window
    • Sensitivity to N Kα is increased almost 3x
    • Sensitivity to O Kα is doubled
    • Be Kα and Si Lα peaks are easily detected
    • Higher energy sensitivity increased by 40-45%
    • No compromise in peak-to-background ratio or resolution
  • Specially optimised AZtecTEM Tru-Q® analysis algorithm delivers accurate AutoID and quantitative analysis at all energies

Atomic Column Mapping

Fast atAtomic column mappingomic column mapping
The outstanding solid angle, sensitivity and speed of the X-MaxN 100TLE are vital to collection at atomic level magnifications.Specimen drift, beam damage and contamination - challenges that have been limiting factors in the past - have now been solved.

X-ray maps and linescans can now be collected in a dramatically shorter time without compromising performance. This increase in performance makes the X-MaxN 100TLE a must where ultra-high resolution analysis is performed down to the atomic level and the signal is extremely low. The detector also handles count rates in high beam current regimes.


Oxford Instruments thanks the Faculty and Staff of the EMS, University of Illinois, Chicago for their help in preparing these data.





Fast automatic phase analysis
For a more detailed analysis of multiphase systems, AZtecTEM AutoPhaseMap creates a phase map of the specimen using statistical variations rather than clustering or principle components. It provides an unrivalled qualitative and uantitative analysis of automatically identified phases.

Brochure and application note

AZtecTEM solutions brochure

A 16 page brochure showing why AZtecTEM is the most powerful solution for EDS on the TEM. It comprises software and hardware sections (inc X-Max 100TLE and X-Max TSR).

PDF 4.63MB
Semiconductor analysis in the TEM

Development and testing of semiconductor devices requires extensive knowledge of local structure and elemental composition. With feature sizes of <5 nm, it is often necessary to perform imaging and EDS analysis in a S/TEM.

Once in the TEM, there are still many difficulties to be overcome to acquire accurate elemental maps. Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. This brief shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis.

PDF 3.27MB
Simultaneous EDS & EELS in the TEM

In Transmission Electron Microscopy (TEM) there are two ‘go to’ techniques for elemental analysis: Energy Dispersive X-ray Spectroscopy, (EDS), and Electron Energy Loss Spectroscopy, (EELS). Simultaneous acquisition of both signals is a powerful tool for materials analysis...

PDF 4.26MB
EDS for TEM Explained

This 12 page document gives an introduction to EDS applications in the Transmission Electron Microscope (TEM). It covers the theory of the SDD operation and X-ray analysis.

This document is available in bulk free of charge to universities and other institutions giving a course on the subject.

PDF 4.04MB

TEM Lamella Preparation App. Note

TEM Lamella Preparation Application Note

High-resolution TEM image quality is greatly impacted by the thickness of the TEM sample (lamella) and the presence of any surface damage layer created during FIB-SEM sample preparation. Here we present a new technique that enables measurement of the local thickness and composition of TEM lamellae and
discuss its application to the failure analysis of semiconductor devices.

PDF 4.77MB

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Silicon Drift Detector for TEM - X-MaxN TSR

Silicon Drift Detector for TEM - X-MaxN TSR

X-MaxN TSR is Silicon Drift Detector for TEM applications and provides a large solid angle for conventional 200kV TEMs.

SDD Detector for TEM: X-MaxN 80 T

SDD Detector for TEM: X-MaxN 80 T

Specially designed to maximise EDS performance in the TEM, with a large-area 80 mm2 sensor, the X-MaxN 80 T optimises solid angle and analytical performance.

Product Support

Maintenance and Support

Maintenance and Support

Oxford Instruments takes pride in the support and service that we provide. Whether your requirements are general or specific, regional or national, local or international, we can tailor a package specifically for you.