A comparison with established methods

LayerProbe is based on proven technology and has significant benefits compared to alternative techniques:

A comparison of LayerProbe with other techniques
  LayerProbe Ellipsometry XRF FIB/TEM RBS
Non-destructive Yes Yes Yes No Yes
High spatial resolution Yes

No
(>> 1 micron)

No
(> 1 micron)
Yes Yes
Rapid analysis Yes
(a matter of minutes: each point takes seconds)
Yes Yes No (several hours) No
Cost Relatively inexpensive Expensive Expensive Very expensive

Extremely expensive
 

 

How accurate is LayerProbe?


Comparison of ALD layers on silicon substrate
  LayerProbe
Thickness (nm)
Density
(gcm-3)
Ellipsometry
Thickness (nm)
Refractive Index
HfO2 28.1 ± 0.1 9.4 33.6 ± 5 2.04
Al2O3 57.0 ± 0.2 3.0 52.8 ± 5 1.64

 

LayerProbe EDS and RBS composition measurement
  LayerProbe –
Stoichiometric Ratio
RBS –
Stoichiometric Ratio
Hf /O 2.13 2.07
Al /O 1.56 1.60

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Example: PCB Application - Au on Ni on Si substrate

 

LayerProbe and XRF thickness measurement
  LayerProbe
Thickness (nm)
Density (gcm-3) XRF
Thickness (nm)
Au 60.1 ± 0.7 19.3 61 ± 25
Ni 123.5 ± 0.7 8.9 141 ± 24

SEM cross section measurement confirms the result...Example of thin film analysis

Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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