EBIC Analysis in the SEM

EBIC Analysis in the SEM or FIB is easy with Oxford Instruments' OmniProbe E3 system.

OmniProbe E3 microanalysis system enables the complete electrical nanoprobing and characterisation of devices and materials in the SEM & FIB. Typical applications include nanodevice and nanomaterials research, defect identification in CMOS failure analysis, and defect characterisation in optoelectronics and high power devices.

There are three general electrical characterisation methods enabled by the OmniProbe E3 system:

  1. Electron Beam Induced Current (EBIC)

    • EBIC is a method for imaging and characterisation of p-n junctions, recombination strength of defects, diffusion length and surface recombination velocity of minority charge carriers in semiconducting materials and devices.
    • Most effective when employed alongside EDS or EBSD in a wider workflow for nano-fabrication in FIB or sample preparation for TEM or Atom Probe.
  2. Electron Beam Absorbed Current (EBAC)

    • EBAC is a method for identification and physical failure analysis of metal defects (opens and shorts), high resistivity areas and layer non-uniformities in CMOS devices.
    • It is primarily used in combination with electrical nanoprobing.
  3. Electrical probing

    • Nanoprobing is a method for the electrical characterisation of nanodevices and nanomaterials in the FIB & SEM by direct electrical probing and imaging, used primarily for nanoscience and CMOS failure analysis.
    • Complex SMU and full parametric characterisation can be delivered in combination with third party electronic test and measurement equipment; biasing is provided as standard.

The OmniProbe E3 system adds complete electrical characterisation hardware, scan control unit and dedicated EBIC software to general purpose nanomanipulators.

E3 Brochure and EBIC Application Note

E3 Brochure

The E3 quantitative nanoprobing microanalysis system enables the electrical characterisation (EBIC, EBAC and Electrical probing) of devices and materials in the SEM & FIB. This 8 page brochure gives an overview of the E3 product.

PDF 9.22MB
EBIC Analysis Application Note

Electron Beam Induced Current is a well established analysis method of electrical activity in the SEM. It provides a unique correlation of electrical and structural properties with very high spatial resolution.This application note shows how the Oxford Instruments integrated EBIC microanalysis system is configured and applied to analyse defects in a Si solar cell.


PDF 2.95MB

Products In This Group

EBIC Hardware

EBIC Hardware

E3 hardware provides a complete and integrated EBIC/EBAC system for port-mounted OmniProbe100 or 200 manipulators on a FIB or SEM.

EBIC Software

EBIC Software

Quantitative low-noise EBIC/EBAC imaging at high speed, with simultaneous SE and integrated software amplifier control.

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