EBIC analysis in the SEM hardware

Omniprobe E3 provides a complete and integrated acquisition system for EBIC and EBAC, including nanoprobing, stage connection, current amplifier, scan control and calibrated signal acquisition.

The Omniprobe 100 & 200 port mounted manipulators provide electrical probing as well as industry leading nanomanipulation. An optimised coaxial shaft is available for low-noise and high-speed applications, such nanoprobing or EBIC.

E3 Brochure and Application Note

E3 Brochure

The E3 quantitative nanoprobing microanalysis system enables the electrical characterisation (EBIC, EBAC and Electrical probing) of devices and materials in the SEM & FIB. This 8 page brochure gives an overview of the E3 product.

PDF 9.22MB
EBIC Analysis Application Note

Electron Beam Induced Current is a well established analysis method of electrical activity in the SEM. It provides a unique correlation of electrical and structural properties with very high spatial resolution.This application note shows how the Oxford Instruments integrated EBIC microanalysis system is configured and applied to analyse defects in a Si solar cell.

 

PDF 2.95MB

Features and benefits

  • Coaxial shielded connection is provided throughout the electrical shaft, for measurements of currents down to fA range or acquisition speeds up to MHz. This provides highest electrical performance of port mounted nanomanipulators in FIB and SEM. OmniProbe 200 nanomanipulators add closed-loop encoder feedback for accuracy, flexibility and ease of use.
     
  • Omniprobe E3 includes 103 … 1010 V/A amplification with full control of all parameters required for EBIC, including gain, contrast, brightness, current compensation and zero balance. Ease of operation is enhanced further with live preamplifier and EBIC signal monitors and the ability to save/open configuration files.
     
  • A full SEM scanning system is provided, with 16-bit EBIC digitisation, maximum 16,384 x 16,384 scan resolution, up to 4 simultaneous inputs, up to TV frame rate speeds, with mapping, line scan and point modes, including frame and line averaging. Flexible and simultaneous EBIC/SE acquisition provides most powerful acquisition platform for electrical analysis in the SEM.

Nanoprobing system

  • Voltage biasing of ±10V is included as standard, with the ability to run configurable current-voltage sweeps for device characterisation, or verification of correct nanoprobing. This also enables acquisition of images with voltage contrast, and assists nanoprobe touchdown.
     
  • Multiple probe configurations, alongside stage connection, enable complex device probing and configuration. Standard BNC connectors are provided for third party equipment, to enable more complex nanoprobing analysis in the SEM.

Quantitative EBIC measurements

  • Built-in calibration mode with determination of true zero and beam currents, enables automatic management of calibrated EBIC data and quantified workflows. Quantified current signal is essential for comparison between samples and devices, as well as further analysis and data extraction.

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