Omniprobe E3 provides a complete and integrated acquisition system for EBIC and EBAC, including nanoprobing, stage connection, current amplifier, scan control and calibrated signal acquisition.
The Omniprobe 100 & 200 port mounted manipulators provide electrical probing as well as industry leading nanomanipulation. An optimised coaxial shaft is available for low-noise and high-speed applications, such nanoprobing or EBIC.
E3 Brochure and Application Note
The E3 quantitative nanoprobing microanalysis system enables the electrical characterisation (EBIC, EBAC and Electrical probing) of devices and materials in the SEM & FIB. This 8 page brochure gives an overview of the E3 product.
EBIC Analysis Application Note
Electron Beam Induced Current is a well established analysis method of electrical activity in the SEM. It provides a unique correlation of electrical and structural properties with very high spatial resolution.This application note shows how the Oxford Instruments integrated EBIC microanalysis system is configured and applied to analyse defects in a Si solar cell.