Genuine Oxford Instruments Spare Parts

Over time, components wear out and require replacement - our spares kits are designed with the aim of giving you the ability to choose levels of system support tailored to your requirements, saving unnecessary costs.

  • Our Plasma, ALD and Ion Beam products are manufactured using the highest quality precision-made components
  • Fitting 3rd party parts can compromise system and process performance so we suggest always using genuine Oxford Instruments spare parts
  • With spares located in varied locations around the world, we can deliver parts to you quickly when required

For more information on our spares kits please contact us.

Related Support

Service & Support Contracts

Service & Support Contracts

Tailored service contracts: choose options that suit you