Dry Pump N2 Standby Mode can be offered on many of Oxford Instruments Plasma Technology's systems

The N2 Standby Mode will save energy and nitrogen used by its plasma etch, deposition and growth systems. Previously, systems with dry pumps have had their nitrogen purge set continually at up to 35 litres per minute, but the nitrogen only needs to run at these levels when the chamber is running process gases.

Benefits

  • Saves up to 96% of nitrogen gas usage when in ‘standby’
    mode compared to usage during processing
  • Systems with dry pumps previously had their nitrogen purge set continually at up to 35 litres per minute.
  • Nitrogen only needs to run at these levels when the
    chamber is running process gases
  • The nitrogen inlet to the dry pump can be controlled to
    reduce the amount of nitrogen entering the pump on ‘idle’, ‘pumping’ or ‘standby’ mode
  • Continues to purge the pump bearings.

 

Dry Pump N2 Standby Setup

Dry Pump N2 Standby Mode Setup

  • The pump can be set via Oxford Instruments’ PC2000 system software to run the preset flow of nitrogen for a set period prior to and after a process has completed its run.
  • This allows all gases to be safely diluted and pumped away, before returning to the N2 standby mode.

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