Dry Pump N2 Standby Mode can be offered on many of Oxford Instruments Plasma Technology's systems
The N2 Standby Mode will save energy and nitrogen used by its plasma etch, deposition and growth systems. Previously, systems with dry pumps have had their nitrogen purge set continually at up to 35 litres per minute, but the nitrogen only needs to run at these levels when the chamber is running process gases.
Saves up to 96% of nitrogen gas usage when in ‘standby’
mode compared to usage during processing
Systems with dry pumps previously had their nitrogen purge set continually at up to 35 litres per minute.
Nitrogen only needs to run at these levels when the
chamber is running process gases
The nitrogen inlet to the dry pump can be controlled to
reduce the amount of nitrogen entering the pump on ‘idle’, ‘pumping’ or ‘standby’ mode
Continues to purge the pump bearings.