Connect your plasma processing tools to your SECS GEM factory automation software

  • Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
  • Monitor and control the product and tool status for each tool
  • Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc

SECS GEM upgrade features:

  • Industry Standard protocol - straightforward Integration of equipment into existing GEM-SECS HOST workflow
  • Reduces chance of operator errors – Automated control of equipment by factory HOST Automated real-time feedback on system status and recipe execution status from equipment to HOST
  • Supports  200mm SEMI standards E4, E5, E30 and E37