teos_liq_senslrg.jpgTEOS liquid level sensing is available as an upgrade to existing TEOS liquid delivery modules currently without level sensing on the PlasmaPro 100 PECVD & Nanofab.

The level sensing is achieved using ultra sonic level sensors fitted to the TEOS canister. Three level sense positions are read by the Oxford Instruments software and a clear level indication is displayed on screen.

Benefits

  • Clear advance warning of TEOS canister exchange displayed on PC2000 software.
  • The active process automatically stops should TEOS run out. Log file indicates time ran and time remaining to be processed when new canister is fitted.
  • Enables calculation of TEOS usage
  • Canister valves changed from manual valves to air operated pneumatic valves for greater user robustness and more automated operation.

Related Tools

PlasmaPro 100 PECVD System

PlasmaPro 100 PECVD System

Designed to produce excellent uniformity and high rate films, with control of film properties

Nanofab

Nanofab

Controllable growth of nanotubes and nanowires with flexible temperature up to 1200°C

Congratulations to Dr Kate A. Ross for winning the 2018 Lee Osheroff Richardson (LOR) Science Prize for North and S… https://t.co/5GEVpMSy6K
5:11 PM - 20 Feb 18
View more of our tweets