Example of operation using 2Torr and 100mTorr gaugesThis upgrade provides the ability to utilise two differing ranges of capacitance manometer via a single pressure control valve and automatically switch gauge use dependant on pressure.

Benefits:

  • Greater pressure control range
  • Maintains resolution
  • One pressure set point in the process recipe
  • Flexible gauge configuration
  • Increased substrate heat transfer efficiency for ICPCVD processes
  • Increased process flexibility

Download the flyer

Dual CM Gauge Switching Upgrade Flyer

Upgrade for increased process flexibility

PDF 1.41MB

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Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
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