Significant design improvements have been made to Oxford Instruments’ wide temperature range electrodes

Features of the electrode re-design upgrade

  • Increased structural strength of the electrode across the entire temperature range (-150ºC to +400ºC)
    Delivers improved dimensional stability of the electrode, maintaining flatness of the upper surface and hence efective heat transfer to and from the wafer
  • Up-rated heating element to 2kW
    Delivers more heat to the electrode thereby reducing temperature ramping times, increased element lifetime and improved temperature uniformity over the upper surface
  • Design allows fitting of two temperature probes
    Temperature control and over temperature limit “watch dog” provision
  • Increased fluid flow capacity within the electrode
    Delivers increased cooling performance at the wafer, allowing a wider range of processing parameters to be employed
  • Re-design of temperature probe with increased dc bias capability
    Increased processing window with dc bias capability to 1kV, up from 500V limit of previous design

Download the flyer

Cryo Table Upgrade Flyer

Wide temperature range electrode

PDF 581KB

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Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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