Oxford Instruments strives to offer process improvements to customer systems, with benefits of greater productivity, cost reduction or scientific advancements. As a result of our policy of continuous product development, we offer a range of system upgrades that both extend the life of customer systems and add new functionality – for example from one type of process to another. Contracted customers would be able to purchase such upgrades at a discounted list price.

For further details or a quote on any of the above services, please contact us via your local Oxford Instruments sales and customer support office, or email us at: plasmacs@oxinst.com

Spares

Spares

Genuine Oxford Instruments Spare Parts

Repairs

Repairs

Our repair service is is particularly beneficial for electrical and electronic modules

Exchange

Exchange

We offer an exchange Service for high value system parts

Upgrade: Advanced Energy Paramount Generators

Upgrade: Advanced Energy Paramount Generators

Upgrade for superior performance

Upgrade: X20

Upgrade: X20

Newly developed addition the Plasma X20 control systems was designed to replace the Blue RS232 PLC on Plasmalab 100 systems.

LogViewer Software

LogViewer Software

New datalogging software that allows realtime graphing and post run analysis

Upgrade: Comdel Generator

Upgrade: Comdel Generator

Comdel Generator upgrade for increased performance

Dual CM Gauge Switching

Dual CM Gauge Switching

Dual CM Gauge Switching Upgrade for increased process flexibility

Upgrade: TEOS Liquid Level Sensing

Upgrade: TEOS Liquid Level Sensing

TEOS liquid level sensing is now available as an upgrade to existing TEOS liquid delivery modules

Upgrade: CCD1 Spectrometer

Upgrade: CCD1 Spectrometer

A CCD spectrometer is an extremely useful addition to any plasma tool

Upgrade: Control System

Upgrade: Control System

We offer a growing range of control system upgrades, and all are easy to install and set up

Upgrade: Dry Pump N2 Standby Mode

Upgrade: Dry Pump N2 Standby Mode

The Dry Pump N2 Standby mode saves energy and nitrogen used by its plasma etch, deposition and growth systems.

Upgrade: Gas Pod

Upgrade: Gas Pod

Our Gas Pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility.

Upgrade: LN2 Autochangeover

Upgrade: LN2 Autochangeover

An upgrade to our Cryo Tables, the unit may be added as an upgrade to many of our systems

Upgrade: Turbomolecular Vacuum Pump

Upgrade: Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump Upgrades

Upgrade: Optical End Point Detectors

Upgrade: Optical End Point Detectors

Optical End Point Detection Upgrades for Etch & Deposition tools

Upgrade: Hiden HMT RGA

Upgrade: Hiden HMT RGA

The Hiden HMT quadropole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 4 x 10-3 mbar (3 m Torr) without the need for differential pumping.

Upgrade: Automatic Pressure Control (APC)

Upgrade: Automatic Pressure Control (APC)

An Automatic Pressure Control valve is now available as an upgrade for the Oxford Instruments OpAL tool.

Upgrade: Wide temperature range electrode

Upgrade: Wide temperature range electrode

Improvements to design incorporated in the new wide temperature range electrode

Upgrade: Capacitor Manometer

Upgrade: Capacitor Manometer

Upgrade for increased stability and accuracy

Upgrade: Generators

Upgrade: Generators

Plasma Generator upgrade for superior performance

Soft Pump Upgrade

Upgrade for increased performance

Glassman power supply upgrade

Glassman power supply upgrade

Glassman ion beam power supply upgrade

Further Information

Contact Us

  • Sales Enquiries Team

    +1 978 369 9933

  • Customer Support Team

    + 1 800-447-4717

  • Oxford Instruments Plasma Technology

    Online Enquiry