We offer a range of system upgrades that both extend the life of your system and add new functionality.

Upgrades by system type:

  PlasmaPro ALD Tools Ion Beam Growth
80 800 100 1000 400 FlexAL OpAL Ionfab300 Nanofab
Advanced Energy Paramount generator     x            
Automatic pressure control     x       x    
Comdel generator x x x            
Dry pump N2 standby mode x x x     x x   x
Dual CM gauge switching     x     x      
Gas pod x x x x   x x x x
Glassman power supply               x  
Hiden HMT RGA               x  
LN2 autochangeover unit     x            
Logviewer software x x x x x x x x  
Optical end point detectors x x x     x x   x
Soft pump x x x   x        
TEOS liquid level sensing     x           x
Turbomolecular vacuum pump x x x     x x x x
Wide temperature range electrode     x            
X20 Control System x x x     x   x  

Browse all upgrades:

Advanced Energy Paramount Generators

Advanced Energy Paramount Generators

Upgrade for superior performance

Automatic Pressure Control (APC)

Automatic Pressure Control (APC)

APC upgrade for fast and accurate pressure control

Comdel Generator

Comdel Generator

Comdel Generator upgrade for increased performance

Dry Pump N2 Standby Mode

Dry Pump N2 Standby Mode

Get the dry pump N2 standby mode upgrade to save energy & nitrogen

Dual CM Gauge Switching

Dual CM Gauge Switching

Dual CM Gauge Switching Upgrade for increased process flexibility

Gas Pod

Gas Pod

Our upgraded gas pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility.

Glassman power supply

Glassman power supply

Glassman ion beam power supply upgrade

Hiden HMT RGA

Hiden HMT RGA

Unique dual mode RGA system upgrade

LN2 Autochangeover

LN2 Autochangeover

An upgrade to our Cryo Tables

LogViewer Software

LogViewer Software

New datalogging software that allows realtime graphing and post run analysis

Optical End Point Detectors

Optical End Point Detectors

Optical end point detection Upgrades for etch & deposition tools

Ionfab300-1-co

Soft Pump

Soft pump/Soft Vent feature upgrade for increased performance

TEOS Liquid Level Sensing

TEOS Liquid Level Sensing

Upgrade to existing TEOS liquid delivery modules

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump Upgrade

Wide temperature range electrode

Wide temperature range electrode

Improvements to design incorporated in the new wide temperature range electrode

X20 Control System

X20 Control System

X20 control system designed to replace the Blue RS232 PLC.

Further Information

Contact Us

  • Sales Enquiries Team

    +1 978 369 9933

  • Customer Support Team

    + 1 800-447-4717

  • Plasma Technology

    Online Enquiry